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发表于 2006-10-3 12:01:14
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Polar Fab II Wafer Fabrication Facility# [3 k. L5 K4 z% B. w; M9 f
# C# b" S- D. X/ tThe PolarFab II Wafer Fabrication facility is a 24,000 SF, high bay production facility with a 4,000 SF Class cleanroom and 16,000 SF of classified service space. The bay and chase cleanroom is served by two 28,000 cfm make-up air units and sixteen 18,000 cfm recirculation units. Process utilities included de-ionized water, oxygen, nitrogen, dry air, and vacuum systems.
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3 n7 F+ v+ K3 k7 BThe facility is connected to PolarFab existing production plant with a new 1,600 SF clean link. Polar-Fab II comes complete with a new 4,000 amp electrical service, a 1,155-ton chiller plant, and loading dock. In addition to the new facility, approximately 4.5 acres of land were redeveloped and landscaped into a new parking lot and recreation area. |
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