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Swagelok® CR-288® Concentration Monitor

cwh666 发表于: 2006-9-29 09:58 来源: 半导体技术天地

Swagelok® CR-288® Concentration Monitor
The Swagelok CR-288 concentration monitor provides real-time, temperature-compensated concentration measurement in a compact, ultrahigh-purity package. The monitor uses an optical system to accurately measure liquid chemical concentration in real time. The digital display unit and 288-connect® software package combine convenient scalable data interface and acquisition options via a graphical user interface and liquid crystal display.

The CR-288 provides:

Process monitoring for inline liquid chemical applications
Real-time information for point-of-use chemical mixing/blending, spiking and dilution without process intrusion or interruption
PC-based graphical user interface software for data collection, analysis and field calibration
The CR-288 can help to:


Reduce chemical consumption
Identify wafer quality issues early.
Enable process flexibility
Increase tool productivity
CR-288 Concentration Monitor Catalog


Performance Data
Refractive index accuracy (Refractive Index Units, RIU) ± 1 x 10-4
Concentration accuracy: ± 0.1 % 1
Concentration repeatability:  0.01 % 1
Temperature accuracy: ± 0.1° C  
Temperature resolution and repeatability: 0.01° C
Response time: 1.2 s (undamped)
1 Based on measuring ethylene glycol and water at 20 psig (1.3 bar), 76.1 to 78.8°F (24.5 to 26.0°C), and a calibration range of 0 to 100 % concentration.


Features
Sensor

Compact, ultrahigh-purity package
Bowl design optimizes fluid flow over sensor
Meets SEMI F57-0301
Fine thread flare and Nippon Pillar® Super 300
end connections standard; other end connections available

Digital Display Unit  
Connects up to four sensors per DDU
LCD display  
4 to 20 mA output for temperature and concentration
Two 5 V digital output channels  
RS-232 communication with computer software package   
RS-232 serial DB25/DB9 to USB 1.1 adapter included
White powder-coated aluminum housing with mounting slots

288 Connect Software

Windows® based
Allows rapid field calibration to specific process fluid
Interface into real-time process
Real-time concentration and temperature data logging


Semconductor Applications
The CR-288 concentration monitor can be used in a large variety of applications from bulk chemical to chemical delivery units to the process tools and waste streams. The table below indicates some of the areas and applications where the CR-288 has been used.


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